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Effect of CH4partial pressure on the microstructure and mechanical properties of magnetron sputtered TiC films

✍ Scribed by Nan Shao; Lan Feng; Fanghua Mei; Geyang Li

Book ID: 111590716
Publisher: Springer
Year: 2004
Tongue: English
Weight: 172 KB
Volume: 39
Category: Article
ISSN: 0022-2461
DOI: 10.1023/b:jmsc.0000039280.50013.91

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