Microstructure and Electrical Properties of Amorphous Films Grown on Cu/Ti//Si Substrates using RF Magnetron Sputtering

✍ Scribed by Jin-Seong Kim; Kyung-Hoon Cho; Lee-Seung Kang; Jong-Woo Sun; Dong-Soo Paik; Tae-Geun Seong; Chong-Yun Kang; Jong-Hee Kim; Tae-Hyun Sung; Sahn Nahm

• Book ID: 114620407
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 915 KB
• Volume: 58
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2011.2111454