✦ LIBER ✦

Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti–Si–C thin film

✍ Scribed by Chen, Z S; Li, H J; Fu, Q G; Yang, D; Shen, Q L

Book ID: 127347438
Publisher: Institute of Materials, Minerals and Mining
Year: 2013
Tongue: English
Weight: 312 KB
Volume: 29
Category: Article
ISSN: 0267-0836
DOI: 10.1179/1743284713y.0000000236

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