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Effect of annealing temperature on the microstructure and photoluminescence of low resistivity Si/SiN/TaN thin films using magnetron sputtering

✍ Scribed by C.K. Chung; T.S. Chen; N.W. Chang; M.W. Liao; C.T. Lee

Book ID: 113937181
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 368 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.07.061

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