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Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering

✍ Scribed by Monjoy Sreemany; Suchitra Sen

Book ID: 108060010
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 638 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.05.040

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