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Effect of annealing temperature on properties of MgxZn1−xO thin films deposited by RF magnetron sputtering

✍ Scribed by Xijian Zhang; Honglei Ma; Jin Ma; Fujian Zong; Hongdi Xiao; Feng Ji

Book ID
108238695
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
275 KB
Volume
357
Category
Article
ISSN
0921-4526

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✍ Georgi P. Daniel; V.B. Justinvictor; Prabitha B. Nair; K. Joy; Peter Koshy; P.V. 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 339 KB

ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph