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H2/Ar and vacuum annealing effect of ZnO thin films deposited by RF magnetron sputtering system

✍ Scribed by Jwayeon Kim; Myung-chun Kim; Jaekeun Yu; Kyeongsoon Park

Book ID: 108079343
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 745 KB
Volume: 10
Category: Article
ISSN: 1567-1739
DOI: 10.1016/j.cap.2010.02.041

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