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Effects of post-annealing temperature on structural, optical, and electrical properties of MgxZn1−xO films by RF magnetron sputtering

✍ Scribed by Jia Li; Jin-Hua Huang; Wei-Jie Song; Yu-Long Zhang; Rui-Qin Tan; Ye Yang

Book ID
108166279
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
839 KB
Volume
314
Category
Article
ISSN
0022-0248

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ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph