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Micromachined interdigital filter on silicon

✍ Scribed by Neil Thomson; Jia-Sheng Hong

Book ID
102948967
Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
701 KB
Volume
48
Category
Article
ISSN
0895-2477

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✦ Synopsis

Abstract

This article presents a microwave interdigital filter manufactured on high resistive silicon substrate. Two filter designs are referenced in this article; both filters are five pole interdigital filters with one using uniform impedance resonators and the other using stepped impedance resonators. The fabrication of the filters on silicon has been possible with the use of micromachining. This therefore enables filters to be manufactured with smaller footprints and gives rise to further development with micro‐electro‐mechanical systems technology. Β© 2006 Wiley Periodicals, Inc. Microwave Opt Technol Lett 48: 1862–1866, 2006; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.21810

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