## Abstract This article presents a microwave interdigital filter manufactured on high resistive silicon substrate. Two filter designs are referenced in this article; both filters are five pole interdigital filters with one using uniform impedance resonators and the other using stepped impedance re
Micromachined silicon via-holes and interdigital bandpass filters
✍ Scribed by Jian Zhu; Yuanwei Yu; Naibin Yang; Bailing Zhou; Yong Zhang
- Book ID
- 106185027
- Publisher
- Springer-Verlag
- Year
- 2006
- Tongue
- English
- Weight
- 313 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0946-7076
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