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Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane

โœ Scribed by Che-Lung Hsu; Yung-Chih Liu; Chih-Ming Wang; Mount-Learn Wu; Ya-Lun Tsai; Yue-Hong Chou; Chien-Chieh Lee; Jenq-Yang Chang

Book ID
115371806
Publisher
Optical Society of America
Year
2006
Tongue
English
Weight
263 KB
Volume
24
Category
Article
ISSN
0733-8724

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๐Ÿ“œ SIMILAR VOLUMES

Design and fabrication of integrated fil
Design and fabrication of integrated film bulk acoustic resonator and filter on silicon nitride membrane
โœ Jae Yoeng Park; Hee Chul Lee; Seong Jong Cheon ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 709 KB

## Abstract In this paper, fully integrated film bulk acoustic resonators (FBARs) and filter have been designed, fabricated, and characterized by using silicon bulk micromachining technology. The fabricated resonator is comprised of aluminum nitride (AlN) piezoelectric material sandwiched by two mo