## Abstract This article presents a microwave interdigital filter manufactured on high resistive silicon substrate. Two filter designs are referenced in this article; both filters are five pole interdigital filters with one using uniform impedance resonators and the other using stepped impedance re
Micromachined filters on synthesized substrates
β Scribed by Drayton, R.F.; Pacheco, S.P.; Katehi, L.P.B.; Wang, J.; Yook, J.-G.
- Book ID
- 114554017
- Publisher
- IEEE
- Year
- 2001
- Tongue
- English
- Weight
- 166 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0018-9480
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