On-chip micro-transformer with square interwinding coil has been developed. The transformer consists of stacked spiral coil which is fabricated on high resistive glass substrate using MEMS technology. The device is fabricated using simple surface micromachining process including an additional bondin
โฆ LIBER โฆ
Surface micromachined on-chip transformer fabricated on glass substrate
โ Scribed by Jumril Yunas; Azrul Azlan Hamzah; Burhanuddin Yeop Majlis
- Book ID
- 106185590
- Publisher
- Springer-Verlag
- Year
- 2008
- Tongue
- English
- Weight
- 418 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0946-7076
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