Micromachined interdigital filter on sil
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Neil Thomson; Jia-Sheng Hong
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Article
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2006
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John Wiley and Sons
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English
โ 701 KB
## Abstract This article presents a microwave interdigital filter manufactured on high resistive silicon substrate. Two filter designs are referenced in this article; both filters are five pole interdigital filters with one using uniform impedance resonators and the other using stepped impedance re