✦ LIBER ✦

Microengineering design and manufacture using the LIGA process

✍ Scribed by McCormick, M.; Chowanietz, E.; Lees, A.

Book ID: 114442149
Publisher: IEEE
Year: 1994
Tongue: English
Weight: 580 KB
Volume: 3
Category: Article
ISSN: 0963-7346
DOI: 10.1049/esej:19940604

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