✦ LIBER ✦
Cost estimation for LIGA fabrication flows using process design methods
✍ Scribed by K. Hahn; R. Brück; A. Priebe; C. Schneider
- Publisher
- Springer-Verlag
- Year
- 2000
- Tongue
- English
- Weight
- 315 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0946-7076
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