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Fabrication of microneedle array using LIGA and hot embossing process

โœ Scribed by Sang Jun Moon; Seung S. Lee; H. S. Lee; T. H. Kwon

Publisher
Springer-Verlag
Year
2005
Tongue
English
Weight
543 KB
Volume
11
Category
Article
ISSN
0946-7076

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The cross-section profiles of polymer deformation in the hot embossing lithography process were studied by finite element method for various temperature, time and pressure. In order to successfully fabricate high-frequency grating lines, an optimal imprint condition was selected and the related expe