✦ LIBER ✦
Linewidth design rules for microstructures manufactured in PMMA resist using X-ray LIGA
✍ Scribed by Ron A. Lawes
- Book ID
- 106185835
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 784 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0946-7076
No coin nor oath required. For personal study only.