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Microcrystalline silicon thin films studied using spectroscopic ellipsometry

✍ Scribed by T. D. Kang; H. Lee; S. J. Park; J. Jang; S. Lee


Book ID
121849837
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
402 KB
Volume
92
Category
Article
ISSN
0021-8979

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