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Spectroscopic ellipsometry characterization of thin-film silicon nitride

✍ Scribed by G.E. Jellison; Jr; F.A. Modine; P. Doshi; A. Rohatgi

Book ID: 114086308
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 140 KB
Volume: 313-314
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00816-x

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