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Characterization of graded refractive index silicon oxynitride thin films by spectroscopic ellipsometry

✍ Scribed by S. Callard; A. Gagnaire; J. Joseph

Book ID: 114086342
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 157 KB
Volume: 313-314
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00851-1

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