Controlled index of refraction silicon oxynitride films characterized by variable angle spectroscopic ellipsometry

✍ Scribed by Yi-Ming Xiong; Paul G. Snyder; John A. Woollam; G.A. Al-Jumaily; F.J. Gagliardi; Eric R. Krosche

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 451 KB
• Volume: 206
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(91)90430-6