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Micro-machining of resists on silicon by proton beam writing

✍ Scribed by Naoyuki Uchiya; Takuya Harada; Masato Murai; Hiroyuki Nishikawa; Junji Haga; Takahiro Sato; Yasuyuki Ishii; Tomihiro Kamiya

Book ID: 108223923
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 590 KB
Volume: 260
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.02.053

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