Ni electroplating on a resist micro-machined by proton beam writing

✍ Scribed by Naoyuki Uchiya; Yusuke Furuta; Hiroyuki Nishikawa; Tohru Watanabe; Junji Haga; Takahiro Satoh; Masakazu Oikawa; Yasuyuki Ishii; Tomihiro Kamiya

• Book ID: 106185442
• Publisher: Springer-Verlag
• Year: 2008
• Tongue: English
• Weight: 308 KB
• Volume: 14
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-007-0549-0