✦ LIBER ✦
Si micro-turbine by proton beam writing and porous silicon micromachining
✍ Scribed by I. Rajta; S.Z. Szilasi; P. Fürjes; Z. Fekete; Cs. Dücső
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 342 KB
- Volume
- 267
- Category
- Article
- ISSN
- 0168-583X
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