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Micro-hotplates for thermal characterisation of structural materials of MEMS

✍ Scribed by P. Csíkvári; P. Fürjes; Cs. Dücső; I. Bársony


Book ID
104053295
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
359 KB
Volume
40
Category
Article
ISSN
0026-2692

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