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Thermal properties of suspended porous silicon micro-hotplates for sensor applications

✍ Scribed by C. Tsamis; A.G. Nassiopoulou; A. Tserepi

Book ID: 108469670
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 178 KB
Volume: 95
Category: Article
ISSN: 0925-4005
DOI: 10.1016/s0925-4005(03)00409-x

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## Abstract Nanostructured p‐type and n‐type porous silicon samples were prepared for (100) and (111) orientations and a systematic study is carried out on the effects of orientations, dopant type (boron and phosphorous), current density (20 and 30mA/cm^2^) and etching time on the formation, optica