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Fabrication of suspended porous silicon micro-hotplates for thermal sensor applications

✍ Scribed by Tsamis, C. ;Tserepi, A. ;Nassiopoulou, A. G.

Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 115 KB
Volume: 197
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200306560

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