𝔖 Bobbio Scriptorium
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Powerful tools for thermal characterisation of MEMS

✍ Scribed by P. Fürjes; Gy. Bognár; I. Bársony


Book ID
108263628
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
850 KB
Volume
120
Category
Article
ISSN
0925-4005

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Simultaneous electro-thermal experimenta
✍ Coccetti, F. ;Plana, R. 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 300 KB

## Abstract An experimental setup for the characterization of electromagnetically induced heat on MEMS devices operating in high RF power regimes (> 5 W) is here proposed. The technique is based on infrared (IR) imaging of on‐probe DUT, in working conditions. The present work focuses on switches. U