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Micro-friction and adhesion measurements for si wafer and TiB2 thin film

✍ Scribed by Qing, Tao; Shao, Tianmin; Wen, Shizhu


Book ID
108485023
Publisher
Bioline International
Year
2007
Tongue
English
Weight
325 KB
Volume
12
Category
Article
ISSN
1007-0214

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## Abstract Bi~2~Te~3~ films and micro‐pillar arrays were electrodeposited, respectively, onto p‐Si(100) wafers and into micro‐templates that were etched on the same wafers with reactive ion etching (RIE). With the potentials of βˆ’100 to βˆ’300 mV (__vs__. saturated calomel electrode), Bi~2~Te~3~ film