✦ LIBER ✦
Simultaneous measurement of substrate temperature and thin-film thickness on SiO[sub 2]/Si wafer using optical-fiber-type low-coherence interferometry
✍ Scribed by Ohta, Takayuki; Koshimizu, Chishio; Kawasaki, Kanta; Takeda, Keigo; Ito, Masafumi
- Book ID
- 120077399
- Publisher
- American Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 760 KB
- Volume
- 105
- Category
- Article
- ISSN
- 0021-8979
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