𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Micro breakdown in small-area ultrathin gate oxides

✍ Scribed by Cellere, G.; Larcher, L.; Valentini, M.G.; Paccagnella, A.


Book ID
114616823
Publisher
IEEE
Year
2002
Tongue
English
Weight
287 KB
Volume
49
Category
Article
ISSN
0018-9383

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Qbdβˆ’ dependencies of ultrathin gate oxid
✍ G.M. Paulzen πŸ“‚ Article πŸ“… 1997 πŸ› Elsevier Science 🌐 English βš– 246 KB

In this paper a systematic study of the dependence of intrinsic Qbd distributions (gate injection) on oxide thickness (3.5 -5.Tnm), area (0.04 -12.25 mm 2) and current density (-0.3 to -250 mA/cm 2) is reported. The oxides were grown with a similar optimized diluted oxygen furnace process. An increa