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Metal Fluoride Thin Films Prepared by Atomic Layer Deposition

✍ Scribed by Ylilammi, M.

Book ID: 124052664
Publisher: The Electrochemical Society
Year: 1994
Tongue: English
Weight: 683 KB
Volume: 141
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2054910

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