Non-Aqueous Routes to Metal Oxide Thin Films by Atomic Layer Deposition

✍ Scribed by Erwan Rauwel; Guylhaine Clavel; Marc-Georg Willinger; Protima Rauwel; Nicola Pinna

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 343 KB
• Volume: 120
• Category: Article
• ISSN: 0044-8249
• DOI: 10.1002/ange.200705550