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Memory effect of RF sputtered ZrO2 thin films

✍ Scribed by Chih-Yang Lin; Chung-Yi Wu; Chen-Yu Wu; Chun-Chieh Lin; Tseung-Yuen Tseng

Book ID: 108289867
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 828 KB
Volume: 516
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2007.07.140

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