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Melt-interface mechanism for generation of silicon carbide microdefects in silicon

✍ Scribed by Kalejs, J.P.; Chalmers, B.

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 536 KB
Volume: 79
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(86)90481-1

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