Optimization of the surface texture for silicon carbide sliding in water
β Scribed by Xiaolei Wang; Koshi Adachi; Katsunori Otsuka; Koji Kato
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 586 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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Water marks are one of the most common contamination problems, which induce various' kinds" of device defects in (LSI) technology. Water marks have been attributed to residues of water used in the cleaning process. However, the purity of deionized water used in LSI fabrication today is extremely hig