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Mechanisms of reactive sputtering of indium I: Growth of InN in mixed Ar-N2 discharges

✍ Scribed by B.R. Natarajan; A.H. Eltoukhy; J.E. Greene; T.L. Barr


Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
1015 KB
Volume
69
Category
Article
ISSN
0040-6090

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