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Reactive sputtering characteristics of silicon in an ArN2 mixture

✍ Scribed by A. Okamoto; T. Serikawa

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of N2Ar mixing on the reactive s

✍ T. Serikawa; A. Okamoto 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 298 KB

Mechanisms of the biased sputtering of t

✍ J.M. Poitevin; G. Lempérière 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 383 KB

The dynamics of reactive ion sputtering

✍ E. Leja; A. Kołodziej; T. Pisarkiewicz; T. Stapiński 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 235 KB

The abrasion of hot silicon targets by r

✍ K. Steenbeck 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 282 KB

Mechanisms of reactive sputtering of ind

✍ B.R. Natarajan; A.H. Eltoukhy; J.E. Greene; T.L. Barr 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 1015 KB

Measurement of rates of charge exchange

✍ Philippe Gaucherel; Bertrand Rowe 📂 Article 📅 1977 🏛 Elsevier Science ⚖ 868 KB