✦ LIBER ✦

Effect of N2Ar mixing on the reactive sputtering characteristics of silicon

✍ Scribed by T. Serikawa; A. Okamoto

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reactive sputtering characteristics of s

✍ A. Okamoto; T. Serikawa 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 457 KB

The effects of nitrogen flow on reactive

✍ Bor-Yuan Shew; Jow-Lay Huang 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 590 KB

The abrasion of hot silicon targets by r

✍ K. Steenbeck 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 282 KB

Mechanisms of the biased sputtering of t

✍ J.M. Poitevin; G. Lempérière 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 383 KB

The dynamics of reactive ion sputtering

✍ E. Leja; A. Kołodziej; T. Pisarkiewicz; T. Stapiński 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 235 KB

Mechanisms of reactive sputtering of ind

✍ B.R. Natarajan; A.H. Eltoukhy; J.E. Greene; T.L. Barr 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 1015 KB