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Mechanisms of Atomic Layer Deposition on Substrates with Ultrahigh Aspect Ratios

✍ Scribed by Kucheyev, S. O.; Biener, J.; Baumann, T. F.; Wang, Y. M.; Hamza, A. V.; Li, Z.; Lee, D. K.; Gordon, R. G.

No coin nor oath required. For personal study only.

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