Atomic Layer Deposition of Uniform Metal Coatings on Highly Porous Aerogel Substrates

✍ Scribed by Baumann, Theodore F.; Biener, Juergen; Wang, Yinmin M.; Kucheyev, Sergei O.; Nelson, Erik J.; Satcher,, Joe H.; Elam, Jeffrey W.; Pellin, Michael J.; Hamza, Alex V.

• Book ID: 126176307
• Publisher: American Chemical Society
• Year: 2006
• Tongue: English
• Weight: 328 KB
• Volume: 18
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm061752g