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Rapid Coating of Through-Porous Substrates by Atomic Layer Deposition

✍ Scribed by M. Ritala; M. Kemell; M. Lautala; A. Niskanen; M. Leskelä; S. Lindfors

Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
494 KB
Volume
12
Category
Article
ISSN
0948-1907

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