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Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition

โœ Scribed by Elam, J. W.; Routkevitch, D.; Mardilovich, P. P.; George, S. M.


Book ID
118267296
Publisher
American Chemical Society
Year
2003
Tongue
English
Weight
539 KB
Volume
15
Category
Article
ISSN
0897-4756

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