Mechanism of phosphorus diffusion gettering of cobalt in silicon studied by Mössbauer spectroscopy

✍ Scribed by Shaikh, A. G.; Schröter, W.; Bergholz, W.

• Book ID: 121496518
• Publisher: American Institute of Physics
• Year: 1985
• Tongue: English
• Weight: 602 KB
• Volume: 58
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.335930