✦ LIBER ✦
Preoxidation gettering of oxidation-induced stacking faults in silicon by the phosphorus diffusion process : Jhy-Horng Chen and Mao-Chieh Chen. Int. J. Electron.47, (6) 555 (1979)
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 149 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2714
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