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Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems

✍ Scribed by Muhlstein, C. L.; Stach, E. A.; Ritchie, R. O.

Book ID
121678790
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
396 KB
Volume
80
Category
Article
ISSN
0003-6951

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πŸ“œ SIMILAR VOLUMES

Mechanisms for Fatigue of Micron-Scale S
Mechanisms for Fatigue of Micron-Scale Silicon Structural Films
✍ D. H. Alsem; O. N. Pierron; E. A. Stach; C. L. Muhlstein; R. O. Ritchie πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 635 KB

## Abstract Although bulk silicon is not susceptible to fatigue, micron‐scale silicon is. Several mechanisms have been proposed to explain this surprising behavior although the issue remains contentious. Here we review published fatigue results for micron‐scale thin silicon films and find that in g