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Investigation of the low-cycle fatigue mechanism for micron-scale monocrystalline silicon films

✍ Scribed by E.K. Baumert; P.-O. Theillet; O.N. Pierron


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
783 KB
Volume
58
Category
Article
ISSN
1359-6454

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## Abstract Although bulk silicon is not susceptible to fatigue, micron‐scale silicon is. Several mechanisms have been proposed to explain this surprising behavior although the issue remains contentious. Here we review published fatigue results for micron‐scale thin silicon films and find that in g