Mechanisms for Fatigue of Micron-Scale S
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D. H. Alsem; O. N. Pierron; E. A. Stach; C. L. Muhlstein; R. O. Ritchie
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Article
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2007
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John Wiley and Sons
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English
⚖ 635 KB
## Abstract Although bulk silicon is not susceptible to fatigue, micron‐scale silicon is. Several mechanisms have been proposed to explain this surprising behavior although the issue remains contentious. Here we review published fatigue results for micron‐scale thin silicon films and find that in g