Mechanical properties of thin Ag films on a silicon substrate studied using the nanoindentation technique
β Scribed by A. V. Panin; A. R. Shugurov; K. V. Oskomov
- Book ID
- 110144544
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2005
- Tongue
- English
- Weight
- 106 KB
- Volume
- 47
- Category
- Article
- ISSN
- 1063-7834
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a
The purpose of this work was to study surface diffusion of atoms in Au-Ag films deposited on SiO 2 substrate under the action of a d.c. field, focusing on the effect of chemical reaction at the Au-Ag/SiO 2 interface on the electromigration behaviour. Atomic force microscopy measurement depicted the