✦ LIBER ✦
The use of non-contact AFM with nanoindentation techniques for measuring mechanical properties of carbon nitride thin films
✍ Scribed by S Chowdhury; M.T Laugier
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 410 KB
- Volume
- 233
- Category
- Article
- ISSN
- 0169-4332
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